Silicon Dioxide Resonators

TYTAN oxidation systems have been used to prepare oxide films needed to fabricate high-Q optical resonators. A world record of Q value close to one billion has been set using a TYTAN oxidation system. TYTAN tubes are proven for the capability of producing prime-quality oxide layers free of impurities up to 20 µm in thickness. The proprietary design and engineering unique to Tystar systems make it possible to run the tool for several weeks without an interruption. TYTAN systems are reputable for their robustness and process stability.

Atmospheric Processes

• Silicon Carbide Devices
• Silicon Dioxide Resonators
• Wet Oxidation
• Dry Oxidation with TLC Bubbler Cleaning Option
• Thick Thermal Oxides
• Diffusion of Solid Source Dopants
• POCL₃ or BBR₃ Liquid Source Dopant Diffusion
• Anneal
• Nano Materials LPCVD