TYTAN 4800
Mini Series
Standard Series
Mega Series
Nano Series
Photo-Enhanced CVD
Modified CVD
Digital Gas Flow Controller
Mass Flow Calibrator
MFC Tester
*For a list of system models, see our catalog here
*Highest voltage available is recommended
*Determines position of load station and source cabinet.
*Laminar flow creates a class 10 clean room environment
*Plasma dissociates >95% of NF3 gas.
*This is a required field