*For a list of system models, see our catalog here

*Highest voltage available is recommended

AC Frequency
System Layout*

*Determines position of load station and source cabinet.

Laminar Flow Station*

*Laminar flow creates a class 10 clean room environment

Plasma Cleaner*

*Plasma dissociates >95% of NF3 gas.

Process #1
Process #2
Process #3
Process #4

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