Mass Flow Calibrator
Mass Flow Tester
TYTAN furnace systems are used to fabricate semiconductor devices, MEMS, and photovoltaic cells. Tystar engineers have continuously refined the reactor designs for over 30 years.
A patented heat-plug reduces the furnace size while still maintaining a superior process uniformity and higher wafer yields.
Photo-Enhanced fabrication uses UV photon energy to deposit dielectric films at a low temperature. Since UV does not ionize process gases, low stress and no radiation damage is observed.
Excellent gas delivery systems allow a small footprint reactor to fabricate single and multi-mode optical fibers.
Tystar offers modules and components for our systems. From testers to gas controllers, our peripherals are engineered to improve manufacturing processes.
Software packages and upgrades are available, simplifying data collection. Our Data Collection System uses Windows 10 for an intuitive user interface.