Tystar TYTAN Furnace

TYTAN furnace systems are used to fabricate semiconductor devices, MEMS, and photovoltaic cells. Tystar engineers have continuously refined the reactor designs for over 30 years.

A patented heat-plug reduces the furnace size while still maintaining a superior process uniformity and higher wafer yields.

Mini Series

  • SMALL FOOTPRINT FOR FULL 50 TO 100 WAFER LOADS
  • EXTREMELY HIGH PROCESS UNIFORMITIES
  • UP-TIME PERFORMANCE IN EXCESS OF 95%
  • LARGE INSTALLED CUSTOMER BASE
  • DEDICATED EXPERT SERVICE
  • UP TO 8"/150 mm CAPABILITY
  • ELECTRIC POWER SAVINGS OF UP TO 50%

Nano Series

  • SMALL FOOTPRINT FOR FULL 50 TO 100 WAFER LOADS
  • VERTICALLY ALIGNED CNT OR VACNT OF UP TO A FEW mm.
  • HORIZONTALLY ALIGNED CNT (HACNT)
  • ENTANGLED (OR COTTON-LIKE) CNT
  • VERTICALLY ALIGNED NANOWIRES
  • HORIZONTALLY ALIGNED NANOWIRES
  • RANDOMLY ORIENTED NANOWIRES
  • GRAPHENES
  • GRAPHENE OXIDE (GO)
  • OTHER NANO MATERIALS

Solar Series

  • SMALL FOOTPRINT FOR FULL 300 TO 500 WAFER LOADS
  • EXTREMELY HIGH PROCESS UNIFORMITIES
  • UP-TIME PERFORMANCE IN EXCESS OF 95%
  • LARGE INSTALLED CUSTOMER BASE
  • DEDICATED EXPERT SERVICE
  • UP TO 8"/200 MM CAPABILITY
  • ELECTRIC POWER SAVINGS OF UP TO 50%

Standard Series

  • SMALL FOOTPRINT FOR FULL 100 TO 200 WAFER LOADS
  • EXTREMELY HIGH PROCESS UNIFORMITIES
  • UP-TIME PERFORMANCE IN EXCESS OF 95%
  • LARGE INSTALLED CUSTOMER BASE
  • DEDICATED EXPERT SERVICE
  • UP TO 8"/200 mm CAPABILITY
  • ELECTRIC POWER SAVINGS OF UP TO 50%

Tabletop Series

  • SMALL FOOTPRINT
  • LOW POWER CONSUMPTION
  • FLEXIBLE DESIGN - ALLOWS FOR EASY CUSTOMIZATION AS NEEDS CHANGE
  • SIMPLE QUARTZ REPLACEMENT PROCEDURES
  • FLEXIBLE DESIGN CAPABLE OF PROCESSING 4, 5, 6 AND 6+ WAFERS WITHOUT QUARTZ CHANGE

Specialized Tystar Reactors

Photo-Enhanced fabrication uses UV photon energy to deposit dielectric films at a low temperature. Since UV does not ionize process gases, low stress and no radiation damage is observed.

Excellent gas delivery systems allow a small footprint reactor to fabricate single and multi-mode optical fibers.

Optical CVD Reactors

  • SINGLE AND MULTI-MODE OPTICAL FIBER PREFORMS
  • COMPACT WITH A SMALL FOOTPRINT
  • HIGH DYNAMIC RANGE OF VAPOR FLOWS
  • PRECISE GAS CONTROL
  • HIGH GAS AND VAPOR FLOW STABILITY
  • ENGINEERED FOR CONTINUOUS OPERATION OF +8 HOURS

Photo-Enhanced CVD Reactors

  • SMALL FOOTPRINT FOR FULL 50 TO 100 WAFER LOADS
  • DIELECTRIC FILM DEPOSITION USING UV LIGHT
  • LOW TEMPERATURE OPERATION (<150°C)
  • LOW FILM STRESS
  • NO IONIZATION, NO RADIATION DAMAGE
  • EXCELLENT STEP COVERAGE
  • DUAL-PROCESS CHAMBERS

Tystar Components

Tystar offers modules and components for our systems. From testers to gas controllers, our peripherals are engineered to improve manufacturing processes.

Software packages and upgrades are available, simplifying data collection. Our Data Collection System uses Windows 10 for an intuitive user interface.

CAL-STAR 400 Mass Flow Calibrator

  • EASY CALIBRATION OF ALL COMMERCIAL MASS FLOW METERS AND CONTROLLERS
  • 4 PRECISION MASS FLOW METERS CALIBRATED TO NIST STANDARDS
  • OPTIONAL DATA COLLECTION SOFTWARE

Mass Flow Device Tester

  • TEST MOST COMMERCIAL MASS FLOW CONTROLLERS AND METERS
  • ROTARY SWITCH TO SELECT TEST POINTS
  • MANUALLY PURGE OR VALVE CLOSE THE MFC
  • MEASURE SET POINT, FLOW OUTPUT, VALVE, ZENER, AND SUPPLY VOLTAGES

MFS-460 Electronic Gas Controller

  • PRECISE CONTROL AND MIXING OF PROCESS GASES
  • COMPACT AND MODULAR DESIGN
  • FABRICATED FROM 316 STAINLESS STEEL WITH ORBITALLY WELDED JOINTS
  • SAFETY INTERLOCK, GAS RATIO CONTROL, AND ERROR BANDS
  • DIRECTS GAS FLOWS OF UP TO 6 MASS FLOW CONTROLLERS