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Get a quote for TYTAN FurnacesTYTAN furnace Systems are used in the fabrication of semiconductor devices, MEMS, and photovoltaic cells. The furnace design has been continuously refined by Tystar over the last 30 years with improvements in its performance and reliability. The process controllers have been redesigned several times to enhance its ease of operation and its accuracy. TYTAN furnace systems are designed for durability, stability and serviceability. TYTAN furnace systems offer a unique approach to the silicon wafer processing industry.
Get a quote for Photo-chemical Reactors The Tystar PVD 1000 Photo-Enhanced CVD Reactor uses ultraviolet light as an energy source for activating process gases for the deposition of dielectric films at low temperatures (<150Â°C). Films of silicon dioxide (SiO2), silicon nitride (Si3N4), silicon oxy-nitride (SiOxNy) and others can be deposited. Minimal stress is observed in these films due to the low deposition temperature.