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Atmospheric Processes

TYTAN Furnace systems can be used for all conventional atmospheric pressure processes employed in the semiconductor industry. Processes run at temperatures above 1150°C require a thicker wall quartz tube, a SiC liner for the tube, SiC wafer boats, and SiC cantilever rods.

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► Oxidation

► Diffusion of Solid Source Dopants

► POCl3 or BBr3 Liquid Source Dopant Diffusion

► Anneal